Krystaly, Hradec Králové, a.s.
 
Quartz Crystal Monitor ( QCM ) image

Quartz Crystal Monitor ( QCM )

General application

Thin film thickness measurement (vacuum evaporation and sputtering), speed of thin film growth, sensor surface weight change - a highly sensitive microbalance.


Typical specifications

Type Quartz Crystal Monitor
 Frequency Range 4990 kHz ... 5040 kHz 5970 kHz ... 6040 kHz 10000 kHz ... 10040 kHz
 Operating Temp. Range +15 ... +55 °C +20 ... +125 °C +15 ... +30 °C
 Frequency Stability vs. Temp. ±5 × 10-6 ±40 × 10-6 ±5 × 10-6
 Resistance 20 Ω max. 20 Ω max. 30 Ω max.
 Metallisation   Au, Ag, Cr+Au, Cr+Ag, Ti+Au, Ti+Ag
 Design   Model 1 or 2   Model 3 or 4
 Drive level   100 µW max.

Differences from standard values (e.g. frequency, dimensions, metallisation and electrode shape) can be consulted.

 
 
 

Dimensions of monitors

Outline dimensions [mm]

  • Model 1 - shape: plan-convex

  • Model 2 - shape: plan-convex

  • Model 3 - shape: plan-plan

 
 
 

KRYSTALY 

Hradec Králové, a.s. 
Okružní 1144 
500 03 Hradec Králové 3 
Česká republika