Quartz Crystal Monitor ( QCM )
Typical application
Typical specifications
Differences from standard values and other parameters (i.e. frequency, dimensions, metallisation and electrode shape) can be consulted.
Measuring the thickness of spray thin films (vacuum evaporation and sputtering),
speed of growth of thin films. Sensors Surface weight change - a highly
sensitive microbalance.
Typical specifications
| Type | Quartz Crystal Monitor | ||
| Frequency Range | 4990 kHz ±20 kHz | 5970 kHz ±20 kHz | 10000 kHz ±20 kHz |
| Operating Temp. Range | +15 ... +55 °C | +20 ... +125 °C | +15 ... +30 °C |
| Frequency Stability vs. Temp. | ±5 x 10-6 |
±40 x 10-6 | ±5 x 10-6 |
| Resistance | 20 Ω max. |
20 Ω max. |
30 Ω max. |
| Metallisation | Cr+Au, Cr+Ag, Au, Ag Model 1 or 2 |
Cr+Au, Cr+Ag, Au, Ag Model 3 |
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| Drive level | 100 µW max. |
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Dimensions of monitors
Outline dimensions [mm]
- Model 1 - shape: plan-convex
- Model 2 - shape: plan-convex
- Model 3 - shape: plan-plan